Design, Simulation, and Fabrication of a New Three-Axis Inertial Switch with a Triangular Movable Electrode Structure - 磁性MEMS器件集成制造及应用

A new three-axis inertial switch is proposed. The triangle-structured movable electrode is designed to improve the inertial switch’s dynamic response performance, especially the movable electrode’s dynamic stability performance. The static mechanical analysis indicated that the displacement of the movable electrode to the fixed electrode in the sensitive direction is the minimum when the acceleration is applied to this designed inertial switch. The dynamic simulation analysis showed that the threshold of the designed inertial is about 235 g. The threshold in the non-sensitive direction is about 240 g, 270 g, 300 g, and 350 g when the directions of applied acceleration deviate 15°, 30°, 45°, and 60° from the sensitive direction, respectively. These results indicated that the designed inertial could resist the impact in non-sensitive directions and improve the stability in sensitive directions. The prototype of the inertial switch was fabricated and tested successfully. The testing results indicate that the threshold of the fabricated inertial switch is about 219 g. The test results verify the dynamic stability performance of the designed inertial switch.